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CONTENT
  1. Reactive Magnetron Sputtering: B901
  2. Cathodic Arc Evaporation: URM 079
  3. Reactive Magnetron Sputtering: SP2000
  4. Bias Activated Reactive Evaporation: Electron Beam
  5. Diffusion Treatments: Vacuum Furnaces
  6. Thermogravimetry: Furnace and Balance
  7. Auger Electron Energy Spectroscopy: Varian
  8. Corrosion Tests: Atlas-Sollich
  9. Basic Investigation Equipment


B 901

Rozmiar: 21900 bajtów

 
Sample holderRotary, with one degree of freedom
Residual pressure10-4 Pa
Chamber equipment4 independent magnetron sputtering sources
(max. power 10 kW each)
Gas supplyInertAr
ReactiveN2, C2H2, O2, CH4
Sample cleaning methodGlow discharge under reduced pressure in Ar atmosphere
Sample bias0 - 400V
OtherSpecimen heating up to 473K
 

URM 079

Rozmiar: 41259 bajtów

 
Sample holderRotary, with two degrees of freedom
(60 independent axis for samples)
Residual pressure10-4 Pa
Chamber equipment
  • 2 continuous arc sources of metal plasma
    (arc current up to 180 A)
  • 2 pulsed arc sources of carbon plasma
    (mean power of the carbon arc discharge 1 kW)
  • 1 magnetron sputtering source (max. power 10 kW)
Gas supplyInertAr
ReactiveN2, C2H2, O2, CH4
Sample cleaning method
  • 4 Ar ion beams
    (max. Ar ion energy - 4keV each,
    without specimen bias)
  • Me ions from arc evaporators
Sample bias
  • High: 800 - 2500V
  • Low: 0 - 200V
OtherSpecimen heating up to 723K
 

SP 2000

Rozmiar: 28504 bajtów

 
Residual pressure10-4 Pa
Chamber equipment 1 magnetron sputtering source (max. power 10 kW)
Gas supplyInertAr
ReactiveN2, C2H2, O2, CH4
Sample cleaning method Glow discharge under reduced pressure in Ar atmosphere
Sample bias0 - 400V
 

Vacuum Furnaces

 
Quartz tube inner diameter80 mm or 110 mm
Residual pressure10-3 Pa
Max. temperature 1473K
Gas supplyInertAr
ReactiveN2, C2H2, O2, CH4
Additional equipment Glow discharge supply for plasma treatment of specimen surface
 

Thermogravimetry: Furnace with Balance

 
 

Basic Invesigation Equipment

Rozmiar: 21506 bajtówOlimpus Optical Microscope
CalotesterRozmiar: 4689 bajtów
Rozmiar: 20480 bajtów Interference Microscope
 

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